A Differential Backside Laserprober Technique for the Investigation of the Lateral Temperature Distribution in Power Devices

Titel A Differential Backside Laserprober Technique for the Investigation of the Lateral Temperature Distribution in Power Devices
Medien Proc. of ISPSD'99
Verfasser C Fuerboeck, R Thalhammer, M Litzenberger, Prof. Dr. techn. Norbert Seliger, D Pogany, E Gornik, G Wachutka
Seiten 193
Veröffentlichungsdatum 1999
Zitation Fuerboeck, C; Thalhammer, R; Litzenberger, M; Seliger, Norbert; Pogany, D; Gornik, E; Wachutka, G (1999): A Differential Backside Laserprober Technique for the Investigation of the Lateral Temperature Distribution in Power Devices. Proc. of ISPSD'99, 193.