A study of backside laser-probe signals in MOSFETs

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Titel A study of backside laser-probe signals in MOSFETs
Medien Microelectronic Engineering
Verfasser Prof. Dr. techn. Norbert Seliger, P Habas, E Gornik
Veröffentlichungsdatum 1996
Zitation Seliger, Norbert; Habas, P; Gornik, E (1996): A study of backside laser-probe signals in MOSFETs. Microelectronic Engineering. DOI: 10.1016/0167-9317(95)00329-0