| Titel | A study of backside laser-probe signals in MOSFETs |
|---|---|
| Medien | Microelectronic Engineering |
| Verfasser | Prof. Dr. techn. Norbert Seliger, P Habas, E Gornik |
| Veröffentlichungsdatum | 1996 |
| Zitation | Seliger, Norbert; Habas, P; Gornik, E (1996): A study of backside laser-probe signals in MOSFETs. Microelectronic Engineering. DOI: 10.1016/0167-9317(95)00329-0 |