Backside laserprober characterization of thermal effects during high current stress in Smart Power ESD protection devices

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Titel Backside laserprober characterization of thermal effects during high current stress in Smart Power ESD protection devices
Medien International Electron Devices Meeting
Verfasser C Furbock, Prof. Dr. techn. Norbert Seliger, D Pogany, M Litzenberger, E Gornik, M Stecher, H Gossner, W Werner
Veröffentlichungsdatum 1998
Zitation Furbock, C; Seliger, Norbert; Pogany, D; Litzenberger, M; Gornik, E; Stecher, M; Gossner, H; Werner, W (1998): Backside laserprober characterization of thermal effects during high current stress in Smart Power ESD protection devices. International Electron Devices Meeting. DOI: 10.1109/IEDM.1998.746451