Investigating the Role of Thermal Effects in RF Immunity of MEMS Microphones

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Titel Investigating the Role of Thermal Effects in RF Immunity of MEMS Microphones
Medien 2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC)
Verfasser Margarita Chizh, Matthias Schmidt, Sebastian Kisban, Bogdan Tanc, M.Eng. Yogesh Babu, Prof. Dr.-Ing. Gregor Feiertag, Prof. Dr.-Ing. Matthias Winter, Sushil Bharatan
Veröffentlichungsdatum 15.09.2025
Zitation Chizh, Margarita; Schmidt, Matthias; Kisban, Sebastian; Tanc, Bogdan; Babu, Yogesh; Feiertag, Gregor; Winter, Matthias; Bharatan, Sushil (2025): Investigating the Role of Thermal Effects in RF Immunity of MEMS Microphones. 2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC). DOI: 10.23919/empc63132.2025.11222425