Thermoacoustic Coupling as the Dominant RF Interference Mechanism in MEMS Microphones

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Titel Thermoacoustic Coupling as the Dominant RF Interference Mechanism in MEMS Microphones
Medien Micromachines
ISSN 2072-666X
Verfasser M.Eng. Yogesh Babu, Margarita Chizh, Sebastian Kisban, Matthias Schmidt, Prof. Dr.-Ing. Gregor Feiertag, Prof. Dr.-Ing. Matthias Winter
Veröffentlichungsdatum 30.10.2026
Zitation Babu, Yogesh; Chizh, Margarita; Kisban, Sebastian; Schmidt, Matthias; Feiertag, Gregor; Winter, Matthias (2026): Thermoacoustic Coupling as the Dominant RF Interference Mechanism in MEMS Microphones. Micromachines. DOI: 10.3390/mi17111259